JPH01102754U - - Google Patents
Info
- Publication number
- JPH01102754U JPH01102754U JP19766887U JP19766887U JPH01102754U JP H01102754 U JPH01102754 U JP H01102754U JP 19766887 U JP19766887 U JP 19766887U JP 19766887 U JP19766887 U JP 19766887U JP H01102754 U JPH01102754 U JP H01102754U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- sensors
- insulating substrate
- sensitive film
- input terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19766887U JPH01102754U (en]) | 1987-12-26 | 1987-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19766887U JPH01102754U (en]) | 1987-12-26 | 1987-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01102754U true JPH01102754U (en]) | 1989-07-11 |
Family
ID=31488211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19766887U Pending JPH01102754U (en]) | 1987-12-26 | 1987-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01102754U (en]) |
-
1987
- 1987-12-26 JP JP19766887U patent/JPH01102754U/ja active Pending
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